Pushing the limits of lithography

T Ito, S Okazaki - Nature, 2000 - nature.com
The phenomenal rate of increase in the integration density of silicon chips has been sustained
in large part by advances in optical lithography — the process that patterns and guides …

Distributed hydrogen determination with fiber-optic sensor

S Sumida, S Okazaki, S Asakura, H Nakagawa… - Sensors and Actuators B …, 2005 - Elsevier
In order to develop a distributed hydrogen sensor, a fiber-optic evanescent-wave sensor
was characterized using optical time domain reflectometry (OTDR). A silica core (Ø=100μm) …

Electrophysiological abnormalities of spatial attention in adults with autism during the gap overlap task

Y Kawakubo, K Kasai, S Okazaki… - Clinical …, 2007 - Elsevier
OBJECTIVE: We evaluated event-related potentials (ERPs) elicited by attentional
disengagement in individuals with autism. METHODS: Sixteen adults with autism, 17 adults with …

Resolution limits of optical lithography

S Okazaki - Journal of Vacuum Science & Technology B …, 1991 - pubs.aip.org
The development of optical lithography has promoted the development of ultralarge scale
integration (ULSI) devices. However, optical lithography is now facing serious obstacles due to …

Antitumor activity of a novel quinoline derivative, TAS‐103, with inhibitory effects on topoisomerases I and II

T Utsugi, K Aoyagi, T Asao, S Okazaki… - Japanese journal of …, 1997 - Wiley Online Library
A novel quinoline derivative, TAS‐103 (6‐[[2‐(dimethyIamino)ethyl]amino]‐3‐hydroxy‐7H‐indeno[2,l‐c]quinolin‐7‐one
dihydrochloride), was developed as an anticancer agent …

Spleen-preserving distal pancreatectomy with conservation of the splenic artery and vein: techniques and its significance

W Kimura, M Yano, S Sugawara, S Okazaki… - Journal of hepato-biliary …, 2010 - Springer
Background Preservation of the spleen in distal pancreatectomy has recently attracted
considerable attention. Since our first trial and success with spleen-preserving distal …

Suppression of pathogenicity of Porphyromonas gingivalis by newly developed gingipain inhibitors

…, R Takii, M Hashimoto, T Tsukuba, S Okazaki… - Molecular …, 2004 - ASPET
Arg-gingipain (Rgp) and Lys-gingipain (Kgp) are cysteine proteinases produced by
Porphyromonas gingivalis, a major etiological bacterium of periodontal diseases. Here we show a …

High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution

S Okazaki - Microelectronic Engineering, 2015 - Elsevier
The development of integrated circuits has been stimulated by the miniaturization of the
device feature size on a chip. The development of lithographic technologies such as optical …

Decision-making patterns and sensitivity to reward and punishment in children with attention-deficit hyperactivity disorder

T Masunami, S Okazaki, H Maekawa - International journal of …, 2009 - Elsevier
Earlier studies have demonstrated that attention-deficit hyperactivity disorder (ADHD) is
associated with aberrant sensitivity to rewards and punishments. Although some studies have …

Catalytic combustion type optical fiber Bragg grating hydrogen gas sensor using platinum-loaded fumed silica powder

S Okazaki, H Kawada, Y Koshiba, N Kasai… - International Journal of …, 2023 - Elsevier
In order to ensure the safety of hydrogen energy system, a robust and reliable hydrogen
sensor device with an optical fiber Bragg grating (FBG) has been developed. The sensing …