Mean and SD of Misregistration Parameters of Implementation Using Simplex Optimization
| Al | Misregistration parameter | Time (s) | Success rate (%) | |||||
|---|---|---|---|---|---|---|---|---|
| δθx (deg) | δθy (deg) | δθz (deg) | δtx (mm) | δty (mm) | δtz (mm) | |||
| SF | −0.23 ± 0.58 | 0.27 ± 0.71 | −0.01 ± 0.70 | 0.10 ± 0.34 | 0.24 ± 0.35 | −0.20 ± 0.46 | 89 | 90 |
| SA | −1.02 ± 1.99 | 0.03 ± 0.75 | −0.07 ± 0.67 | −0.07 ± 0.38 | 0.62 ± 1.18 | −0.09 ± 0.46 | 81 | 100 |
Al = algorithm; SF = simplex with fixed number of bins; SA = simplex with adaptive number of bins.